Palladium Ultra Thin Layer Profiles Evaluation by Evanescent Light

DOI: 10.4236/msa.2013.49070   PDF   HTML     2,893 Downloads   4,051 Views   Citations

Abstract

Nanometric profiles of sputtered ultra-thin Pd layers with thicknesses in the range 1 - 10 nm were investigated by capturing the leaking evanescent light from optical waveguides. The Pd films were deposited by sputtering on glass substratesalso servingas light waveguides. Calibrating the thickness values for the ultra-thin Pd films obtained from the sputtering rate combined with the DELI estimation technique, gave detailed 1Dand 3D morphological nanometric profiles of the deposited layers.

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N. Mirchin, I. Lapsker, E. Tannous and A. Peled, "Palladium Ultra Thin Layer Profiles Evaluation by Evanescent Light," Materials Sciences and Applications, Vol. 4 No. 9, 2013, pp. 572-577. doi: 10.4236/msa.2013.49070.

Conflicts of Interest

The authors declare no conflicts of interest.

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