Palladium Ultra Thin Layer Profiles Evaluation by Evanescent Light


Nanometric profiles of sputtered ultra-thin Pd layers with thicknesses in the range 1 - 10 nm were investigated by capturing the leaking evanescent light from optical waveguides. The Pd films were deposited by sputtering on glass substratesalso servingas light waveguides. Calibrating the thickness values for the ultra-thin Pd films obtained from the sputtering rate combined with the DELI estimation technique, gave detailed 1Dand 3D morphological nanometric profiles of the deposited layers.

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N. Mirchin, I. Lapsker, E. Tannous and A. Peled, "Palladium Ultra Thin Layer Profiles Evaluation by Evanescent Light," Materials Sciences and Applications, Vol. 4 No. 9, 2013, pp. 572-577. doi: 10.4236/msa.2013.49070.

Conflicts of Interest

The authors declare no conflicts of interest.


[1] G. Socol, E. Axente, M. Oane, L. Voicu, A. Petris, V. Vlad, I. N. Mihailescu, N. Mirchin, R. Margolin, D. Naot and A. Peled, “Nanoscopic Photodeposited Structures Analyzed by an Evanescent Optical Method,” Applied Surface Science, Vol. 253, No. 15, 2007, pp. 6535-6538. doi:10.1016/j.apsusc.2007.01.076
[2] N. Mirchin, M. Gankin, U. Gorodetsky, S.A. Popescu, I. Lapsker, A. Peled, L. Duta, G. Dorcioman, A. Popescu and I. N. Mihailescu, “Estimation of Polyethylene Nanothin Layer Morphology by Differential Evanescent Light Intensity Imaging,” Journal of Nanophotonics, Vol. 4, No. 1, 2010, Article ID: 014760.
[3] N. Mirchin, B. Apter, I. Lapsker, V. Fogel, U. Gorodetsky, S. A. Popescu, A. Peled, G. Popescu-Pelin, G. Dorcioman, L. Duta, A. Popescu and I. N. Mihailescu, “Measuring Nanolayer Profiles of Various Materials by Evanescent Light Technique,” Journal of Nanoscience and Nantechnology, Vol. 12, No. 3, 2012, pp. 2668-2671. doi:10.1166/jnn.2012.5788
[4] N. Mirchin and A. Peled, “Evaluating Nanoprofiles of Materials Deposited on Waveguides by an Evanescent Light Method,” Journal of Advanced Microscopy Research, Vol. 7, No. 1, 2012, pp. 1-6.
[5] L. Novotny and B. Hecht, “Principles of Nanooptics,” Cambridge University Press, Cambridge, 2006.
[6] F. de Fornel, “Evanescent Waves from: From Newtonian Optics to Atomic Optics,” Springer Series in Optical Sciences, Vol. 73, Springer Verlag, Berlin, 2000.
[10] C. Girard, “Near Fields in Nanostructures,” Reports on Progress in Physics, Vol. 68, No. 8, 2005, pp. 1883-1933. doi:10.1088/0034-4885/68/8/R05
[11] E. Eremina, N. Grishina, Y. Eremin, L. Helden and T. Wriedt, “Total Internal Reflection Microscopy with a Multilayered Interface: A Light Scattering Model Based on a Discrete Sources Method,” Journal of Optics A: Pure and Applied Optics, Vol. 8, No. 11, 2006, pp. 999-1006. doi:10.1088/1464-4258/8/11/011
[12] M. Quinten, A. Pack and R. Wannemacher, “Scattering and Extinction of Evanescent Waves by Small Particles,” Applied Physics B, Vol. 68, No. 1, 1999, pp. 87-92. doi:10.1007/s003400050591
[13] G. P. Wiederrecht, “Near Field Optical Imaging of Noble Metal Nanoparticles,” The European Physical Journal— Applied Physics, Vol. 28, No. 1, 2004, pp. 3-18. doi:10.1051/epjap:2004170
[14] R. E. Hummel, “Electronic Properties of Materials,” 3rd Editon, Springer-Verlag, New York, 2001, p. 204. doi:10.1007/978-3-642-86538-1

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