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D. Gruber, F. Kraus and J. Müller, “A Novel Gas Sensor Design Based on CH4/H2/H2O Plasma Etched ZnO Thin Films,” Sensors and Actuators B: Chemical, Vol. 92, No. 1-2, 2003, pp. 81-89. doi:10.1016/S0925-4005(03)00013-3

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