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P. Basset, D. Galayko, A. M. Paracha, F. Matty, A. Dudka and T. Bouroina, “A Bath Fabricated and Electret-Free Silicon Electrostatic Vibration Energy Harvester,” Journal of Micromechanics and Microengineering, Vol. 19, No. 11, 2009, Article ID: 115025.
http://dx.doi.org/10.1088/0960-1317/19/11/115025

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