Two-Capacitor Electrostatic Microgenerators

Abstract

All modes of operation of a two-capacitor generator based on overflow of the charge accumulated in capacitors through the load resistance between two capacitors with antiphase modulated capacitances by means of in-plane or out-of-plane shift of the electrode plates under action of a mechanical force are analyzed paying the especial attention to fabrication of the generators with small sizes. Numerical solutions for all the modes are obtained, and they are found to be universal. Analytical estimates of the maximum power of the generator as a function of the capacitances modulation factor are derived. Experimental investigations of a two-capacitor rotational electric generator show that its characteristics are consistent with the analysis performed and that this analysis can be used to describe all specific features of operation of particular generators. Applications of the devices in micro-design for feeding the remote sensors are discussed.

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I. Baginsky, E. Kostsov and V. Kamishlov, "Two-Capacitor Electrostatic Microgenerators," Engineering, Vol. 5 No. 11A, 2013, pp. 9-18. doi: 10.4236/eng.2013.511A002.

Conflicts of Interest

The authors declare no conflicts of interest.

References

[1] S. Roundy, P. K. Wright and J. Rabaey, “A Study of Low Level Vibrations as a Power Source for Wireless Sensor Nodes,” Computer Communications, Vol. 26, No. 11, 2003, pp. 1131-1144.
http://dx.doi.org/10.1016/S0140-3664(02)00248-7
[2] K. A. Cook-Chennault, N. Thambi and A. M. Sastry, “Powering MEMS Portable Devices—A Review of NonRegenerative and Regenerative Power Supply Systems with Special Emphasis on Piezoelectric Energy Harvesting Systems,” Smart Materials and Structures, Vol. 17, No. 4, 2008, Article ID: 043001.
http://dx.doi.org/10.1088/0964-1726/17/4/043001
[3] S. P. Beeby, M. J. Tudor and N. M. White, “Energy Harvesting Vibration Sources for Mycrosystems Applications,” Measurement Science and Technology, Vol. 17, No. 12, 2006, pp. R175-R195.
http://dx.doi.org/10.1088/0957-0233/17/12/R01
[4] J. Lueke and W. A. Moussa, “MEMS-Based Power Generation Techniques for Implantable Biosensing Applications,” Sensors, Vol. 11, No. 2, 2011, pp. 1433-1460.
http://dx.doi.org/10.3390/s110201433
[5] A. Harb, “Energy Harvesting: State-of-Art,” Renewable Energy, Vol. 36, No. 10, 2011, pp. 2641-2654.
http://dx.doi.org/10.1016/j.renene.2010.06.014
[6] N. G. Stephen, “On Energy Harvesting from Ambient Vibration,” Journal of Sound and Vibration, Vol. 293, No. 1-2, 2006, pp. 409-425.
http://dx.doi.org/10.1016/j.jsv.2005.10.003
[7] A. D. Moore, “Electrostatics and Its Application,” Wiley, New York, 1973.
[8] J. Chang, A. J. Kelly and J. M. Crowley, “Handbook on Electrostatic Processes,” Marcel Dekker Inc., New York, 1995.
[9] M. Miyazaki, H. Tanaka, G. Ono, T. Nagano, N. Ohkubo and T. Kawahara, “Electric-Energy Generation Using Variable-Capacitive Resonator for Power-Free-LSI,” IEICE Transactions on Electronics, Vol. E87, No. 4, 2004, pp. 549-555.
[10] P. D. Mitcheson, P. Miao, B. H. Stark, E. M. Yeatman, A. S. Holmes and T. C. Green, “MEMS Electrostatic Micropower Generator for Low Frequency Operation,” Sensors Actuators, Vol. A115, No. 2-3, 2004, pp. 523-529.
http://dx.doi.org/10.1016/j.sna.2004.04.026
[11] S. Meninger, J. Mur-Miranda, R. Amirtharajah, A. Chandraksan and J. H. Lang, “Vibration to Electric Energy Conversion,” IEEE Transactions on Very Large Scale Integration (VLSI) Systems, Vol. 9, No. 1, 2001, pp. 64-76.
[12] P. D. Mitcheson, T. Sterken, C. He, M. Kiziroglou, E. M. Yeatman and R. Puers, “Electrostatic Microgenerators,” Measurement & Control, Vol. 41, No. 4, 2008, pp. 114119. http://dx.doi.org/10.1177/002029400804100404
[13] P. Basset, D. Galayko, A. M. Paracha, F. Matty, A. Dudka and T. Bouroina, “A Bath Fabricated and Electret-Free Silicon Electrostatic Vibration Energy Harvester,” Journal of Micromechanics and Microengineering, Vol. 19, No. 11, 2009, Article ID: 115025.
http://dx.doi.org/10.1088/0960-1317/19/11/115025
[14] Y. Chiu, C.-T. Kuo and Yu.-Sh. Chu, “Design and Fabrication of a Micro Electrostatic Vibration-to-Electricity Energy Converter,” Proceedings of DTIP MEMS MOEMS, Stresa, 26-28 April 2006, pp. 1633-1669.
[15] D. Hoffmann, B. Folkner and Y. Manoli, “Multi-Parameter Optimization of Electrostatic Micro-Generators Using Design Optimization Algorithms,” Smart Materials and Structures, Vol. 19, No. 11, 2010, Article ID: 115016.
http://dx.doi.org/10.1088/0964-1726/19/11/115016
[16] M. E. Kiziroglou, C. He and E. M. Yetman, “Rolling Rod Electrostatic Microgenerator,” IEEE Transactions on Industrial Electronics, Vol. 56, No. 4, 2009, pp. 1101-1108.
http://dx.doi.org/10.1109/TIE.2008.2004381
[17] Sh. Roundy, P. K. Wright and K. S. J. Pister, “MicroElectrostatic Vibration-to-Electricity Converters,” Proceedings of IMECE, New Orleans, 17-22 November 2002, pp. 1-10.
[18] M. Hill and C. O. Mahony, “Modelling and Performance Evaluation of a MEMS dc/dc Converter,” Journal of Micromechanics and Microengineering, Vol. 16, No. 6, 2006, pp. S149-S155.
http://dx.doi.org/10.1088/0960-1317/16/6/S22
[19] N. Mohamad, P. Iovenitti and Th. Vinay, “Modelling and Optimisation of a Spring-Supported Diaphragm Capacitive MEMS Microphone,” Engineering, Vol. 2, No. 10, 2010, pp. 762-770.
http://dx.doi.org/10.4236/eng.2010.210098
[20] S. M. Grachevski, P. D. Funkenbush, Z. Jia, D. S. Ross and M. D. Potter, “Design and Modeling of a Micro-Energy Harvester Using Embedded Charge Layer,” Journal of Micromechanics and Microengineering, Vol. 16, No. 2, 2006, pp. 235-241.
http://dx.doi.org/10.1088/0960-1317/16/2/007
[21] M. Mizuno and P. G. Chetwynd, “Investigation of Resonance Microgenerator,” Journal of Micromechanics and Microengineering, Vol. 13, No. 2, 2003, pp. 209-216.
http://dx.doi.org/10.1088/0960-1317/13/2/307
[22] T. Masaki, K. Sakurai, T. Yokoyama, M. Ikuta, H. Sameshima, M. Doi, T. Seki and M. Oba, “Power Output Enhancement of a Vibration-Driven Electret Generator for Wireless Sensor Applications,” Journal of Micromechanics and Microengineering, Vol. 21, No. 10, 2011, Article ID: 104004.
http://dx.doi.org/10.1088/0960-1317/21/10/104004
[23] H. Lo and Y.-Ch. Tai, “Parylene-Based Electret Power Generators,” Journal of Micromechanics and Microengineering, Vol. 18, No. 10, 2008, Article ID: 104006.
[24] Y. Suzuki, “Recent Progress in MEMS Electret Generator for Energy Harvesting,” IEEJ Transactions, Vol. 6, No. 2, 2011, pp. 101-111.
[25] Y. Sakane, Y. Suzuki and N. Kasagi, “The Development of a High-Performance Perfluorinated Polymer Electret and Its Application to Micro Power Generation,” Journal of Micromechanics and Microengineering, Vol. 18, No. 10, 2008, Article ID: 104011.
http://dx.doi.org/10.1088/0960-1317/18/10/104011
[26] I. L. Baginsky, E. G. Kostsov and A. A. Sokolov, “Electrostatic Microgenerators of Energy with a High Specific Power,” Optoelectronics, Instrumentation and Data Processing., Vol. 46, No. 6, 2010, pp. 580-592.
http://dx.doi.org/10.3103/S8756699011060100
[27] O. P. Breaux, “Electrostatic Energy Conversion System,” US4127804, 1978.
[28] I. L. Baginsky and E. G. Kostsov, “The Possibility of Creating a Microelectronic Electrostatic Energy Generator,” Optoelectronics, Instrumentation and Data Processing, No. 1, 2002, pp. 89-102.
[29] I. L. Baginsky and E. G. Kostsov, “High-Energy Capacitive Electrostatic Micromotors,” Journal of Micromechanics and Microengineering, Vol. 13, No. 11, 2003, pp. 190-200. http://dx.doi.org/10.1088/0960-1317/13/2/305
[30] I. L. Baginsky and E. G. Kostsov, “High Energy Output MEMS Based on Thin Layers of Ferroelectric Materials,” Ferroelectrics, Vol. 351, No. 1-1, 2007, pp. 69-78.

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