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J. Vilcarromero, M. N. P. Carre?o and I. Pereyra, “Mechanical Properties of Boron Nitride Thin film Obtained by RF-PECVD at Low Temperatures,” Thin Solid Films, Vol. 373, No. 1-2, 2000, pp. 273-276. doi:10.1016/S0040-6090(00)01096-8

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