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L. Wu, E. Ko, A. Dulkin, K. J. Park, S. Fields, K. Leeser, L. Meng and D. N. Ruzic, “Flux Energy Analysis of Species in Hollow Cathode Magnetron Ionize Physical Vapor Deposition of Copper,” Review of Scientific Instruments, Vol. 81, No. 12, 2010, Article ID: 123502.

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