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Article citations


E. Klawuhn, G. C. D’Couto, K. A. Ashtiani, P. Rymer, M. A. Biberger and K. B. Levy, “Ionized Physical-Vapor Deposition Using a Hollow-Cathode Magnetron Source for Advanced Metallization,” Journal of Vacuum Science & Technology, Vol. 18A, No. 4, 2000, pp. 1546-1549.

has been cited by the following article: