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Kang, Y.H., Oh, S.S., Kim, Y.S. and Choi, C.G. (2010) Fabrication of Antireflection Nanostructures by Hybrid Nano-Patterning Lithography. Microelectronic Engineering, 87, 125-128.
https://doi.org/10.1016/j.mee.2009.06.006

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