TITLE:
Fabrication of Erbium and Ytterbium Co-Doped Tantalum-Oxide Thin Films Using Radio-Frequency Co-Sputtering
AUTHORS:
Kenta Miura, Yuki Arai, Kazusa Kano, Osamu Hanaizumi
KEYWORDS:
Tantalum Oxide, Erbium, Ytterbium, Co-Sputtering, Photoluminescence
JOURNAL NAME:
Materials Sciences and Applications,
Vol.6 No.5,
April
21,
2015
ABSTRACT: An erbium and ytterbium co-doped tantalum-oxide (Ta2 O5:Er, Yb) thin film was fabricated using a
simple co-sputtering method for the first time, and its photoluminescence (PL) spectrum was evaluated.
Energy transfers between Er3+ and Yb3+ in the Ta2 O5:Er, Yb co-sputtered thin film were
discussed by comparing between PL spectra of the Ta2 O5:Er, Yb film and Ta2 O5:Er or Ta2 O5:Yb films
reported in our previous works. Such a Ta2 O5:Er, Yb co-sputtered film can be used as a high-refractive-
index and light-emitting material of a multilayered photonic crystal that can be applied to a
novel light-emitting device, and it will also be used as a multi-functional coating film having both
anti-reflection and down-conversion effects for realizing a high-efficiency silicon solar cell.