Deposition of Titanium Layer on Steel Substrate Using PECVD Method: A Parametric Study

DOI: 10.4236/msa.2014.53018   PDF   HTML     3,641 Downloads   5,026 Views   Citations


Metallic titanium film was deposited on H-13 steel substrate at 470°C - 530°C using plasma enhanced chemical vapor deposition (PECVD) method. In this paper, the effects of manufacturing parameters were investigated on deposited titanium coating characteristics. XRD, FESEM, XPS and AFM were used in order to study coating characteristics. Increasing hydrogen flow rate from 200 to 360 sccm, resulted in a 72% decrease in oxygen content and 38% decrease in chlorine content of the film. Applied plasma voltage has a severe effect on nanohardness of coating. Pressure of the deposition chamber has a negative effect on titanium characteristics.

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Hedaiatmofidi, H. , Aghdam, A. , Ahangarani, S. , Bozorg, M. , Azadi, M. and Valiei, M. (2014) Deposition of Titanium Layer on Steel Substrate Using PECVD Method: A Parametric Study. Materials Sciences and Applications, 5, 140-148. doi: 10.4236/msa.2014.53018.

Conflicts of Interest

The authors declare no conflicts of interest.


[1] Kawata, K., Sugimura, H. and Takai, O. (2002) Effects of Chlorine on Tribological Properties of TiN Films Prepared by Pulsed d.c. Plasma-Enhanced Chemical Vapor Deposition. Thin Solid Films, 407, 38-44.
[2] Thomsen, A.H.N.B., Mogensenc, K.S., Eskildsen, S.S., Mathiasen, C. and Bùttiger, J. (1998) Residual Stress Determination in PECVD TiN Coatings by X-Ray Diffraction: A Parametric Study. Thin Solid Films, 333, 50-59.
[3] Ma, S.L., Xu, K.W. and Jie, W.Q. (2005) Plasma Nitrided and TiCN Coated AISI H13 Steel by Pulsed dc PECVD and Its Application for Hot-Working Dies. Surface and Coating Technology, 191, 201-205.
[4] Bromark, M., Larsson, M., Hedenqvist, P. and Hogmark, S. (1997) Wear of PVD Ti/TiN Multilayer Coatings. Surface and Coatings Technology, 90, 217-223.
[5] Bemporad, E., Sebastiani, M., Pecchio, C. and De Rossi, S. (2006) High Thickness Ti/TiN Multilayer Thin Coatings for Wear Resistant Applications. Surface and Coatings Technology, 201, 2155-2165. 10.1016/j.surfcoat.2006.03.042
[6] Liu, C., Chu, P.K., Lin, G. and Yang, D. (2007) Effects of Ti/TiN Multilayer on Corrosion Resistance of Nickel-Titanium Orthodontic Brackets in Artificial Saliva. Corrosion Science, 49, 3783-3796.
[7] Chang, C.-L., Jao, J.-Y., Ho, W.-Y. and Wang, D.-Y. (2007) Effects of Titanium-Implanted Pre-Treatments on the Residual Stress of TiN Coatings on High-Speed Steel Substrates. Surface and Coatings Technology, 201, 6702-6706.
[8] Cubillos, A.D., Parra, E.R., Giraldo, B.S., Arango, Y.C. and Arias Mateus, D.F. (2005) Study of TiN and Ti/TiN Coatings Produced by Pulsed-Arc Discharge. Surface and Coatings Technology, 190, 83-89.
[9] Dück, A., Gamer, N., Gesatzke, W., Griepentrog, M., &OUMLsterle, W., Sahre, M. and Urban, I. (2001) Ti/TiN Multilayer Coatings: Deposition Technique, Characterization and Mechanical Properties. Surface and Coatings Technology, 142-144, 579-584.
[10] Kottfer, D., Ferdinandy, M., Kaczmarek, L., Maňková, I. and Beňo, J. (2013) Investigation of Ti and Cr Based PVD Coatings Deposited onto HSS Co 5 Twist Drills. Applied Surface Science, 282, 770-776.
[11] Sobue, S., Yamauchi, T., Suzuki, H., Mukainakano, S., Takenaka, O. and Hattori, T. (1997) Dependence of Diffusion Barrier Properties in Microstructure of Reactively Sputtered TiN Films in Al Alloy/TiN/Ti/Si System. Applied Surface Science, 117-118, 308-311.
[12] Subramanian, B., Ananthakumar, R., Vidhya, V.S. and Jayachandran, M. (2011) Influence of Substrate Temperature on the Materials Properties of Reactive DC Magnetron Sputtered Ti/TiN Multilayered Thin Films. Materials Science and Engineering: B, 176, 1-7.
[13] Zhang, X.-H. and Liu, D.-X. (2009) Effect of TiN/Ti Multilayer on Fretting Fatigue Resistance of Ti-811 Alloy at Elevated Temperature. Transactions of Nonferrous Metals Society of China, 19, 557-562.
[14] Caicedo, J.C., Amaya, C., Yate, L., Nos, O., Gomez, M.E. and Prieto, P. (2010) Hard Coating Performance Enhancement by Using [Ti/TiN]n, [Zr/ZrN]n and [TiN/ZrN]n Multilayer System. Materials Science and Engineering: B, 171 56-61.
[15] Saoula, N., Djerourou, S., Yahiaoui, K., Henda, K., Kesri, R., Erasmus, R.M. and Comins, J.D. (2010) Study of the Deposition of Ti/TiN Multilayers by Magnetron Sputtering. Surface and Interface Analysis, 42, 1176-1179. 10.1002/sia.3299
[16] Liu, D.G., Tu, J.P., Hong, C.F., Gu, C.D., Mai, Y.J. and Chen, R. (2010) Improving Mechanical Properties of a-CNx Films by Ti-TiN/CNx Gradient Multilayer. Applied Surface Science, 257, 487-494.
[17] Cheng, Y.H., Browne, T., Heckerman, B., Bowman, C., Gorokhovsky, V. and Meletis, E.I. (2010) Mechanical and Tribological Properties of TiN/Ti Multilayer Coating. Surface and Coatings Technology, 205, 146-151.
[18] Zhao, Y., Lin, G., Xiao, J., Du, H., Dong, C. and Gao, L. (2011) Ti/TiN Multilayer Thin Films Deposited by Pulse Biased Arc Ion Plating. Applied Surface Science, 257, 2683-2688.
[19] Liu, H.X., Jiang, Y.H., Zhou, R. and Tang B.Y. (2012) Wear Behaviour and Rolling Contact Fatigue Life of Ti/TiN/ DLC Multilayer Films Fabricated on Bearing Steel by PIIID. Vacuum, 86, 848-853.
[20] Zhou, Y., Rao, G.B., Wang, J.Q., Zhang, B., Yu, Z.M., Ke, W. and Han, E.H. (2011) Influence of Ti/TiN Bilayered and Multilayered Films on the Axial Fatigue Performance of Ti46Al8Nb Alloy. Thin Solid Films, 519, 2207-2212.
[21] Huang, R.F., Wen, L.S., Guo, L.P., Gong, J., Yu, B.H. and Bangert, H. (1992) Microstructural and Indentation Characterization of Ti/TiN Multilayer Films. Surface and Coatings Technology, 50, 97-101.
[22] Devia, D.M., Restrepo-Parra, E. and Arango, P.J. (2011) Comparative study of Titanium Carbide and Nitride Coatings Grown by Cathodic Vacuum Arc Technique. Applied Surface Science, 258, 1164-1174.
[23] Major, L., Morgiel, J., Major, B., Lackner, J.M., Waldhauser, W., Ebner, R., Nistor, L. and Van Tendeloo, G. (2006) Crystallographic Aspects Related to Advanced Tribological Multilayers of Cr/CrN and Ti/TiN Types Produced by Pulsed Laser Deposition (PLD). Surface and Coatings Technology, 200, 6190-6195.
[24] Wu, W.-F., Ou, K.-L., Chou, C.-P. and Hsu, J.-L. (2003) PECVD - Ti/TiNx Barrier with Multilayered Amorphous Structure and High Thermal Stability for Copper Metallization. Electrochemistry Solid State Letter, 6, G27-G29.
[25] Radhakrishnan, G., Adams, P.M. and Speckman, D.M. (2000) Low Temperature Pulsed Laser Deposition of Titanium Carbide on Bearing Steels. Thin Solid Films, 358, 131-138.
[26] Ali, N., Bashir, S., Ummi, K., Akram, M. and Mahmood, K. (2013) Effect of Dry and Wet Ambient Environment on the Pulsed Laser Ablation of Titanium. Applied Surface Science, 270, 49-57.
[27] Bull, S.J., Chalker, P.R., Ayres, C.F. and Rickerby, D.S. (1991) The Influence of Titanium Interlayers on the Adhesion of Titanium Nitride Coatings Obtained by Plasma-Assisted Chemical Vapour Deposition. Materials Science and Engineering: A 139, 71-78.
[28] Hu, J.C., Chang, T.C., Chen, L.J., Yang, Y.L. and Chang, C.Y. (1998) Characterization of Multilayered Ti/TiN Films Grown by Chemical Vapor Deposition. Thin Solid Films 332, 423-427.
[29] Ohshita, Y., Oshida, M., Seki, M. and Watanabe, K. (1998) TiSi2/Si Interface Instability in Plasma-Assisted Chemical Vapor Deposition of Titanium. Journal of Crystal Growth, 193, 322-327.
[30] Ruder, A., Grill, A. and Itzhak, D. (1983) Characterization of Titanium Coatings Obtained by the Cold Plasma Technique. Vacuum, 231-233.
[31] Ruder, A. and Itzahk, D. (1982) Titanium Deposition on to Copper Substrates Using the Cold Plasma Technique. Thin Solid Films, 97, 339-343.
[32] von Engel, A. (1983.) Electric Plasma: Their Nature and Uses. Taylor and Francis, London.
[33] Mogensen, N.B.T.K.S., Eskildsen, S.S., Mathiasen, C. and Botiger, J. (1998) A Parametric Study of the Microstructural. Mechanical and Tribological Properties of PACVD TN Coatings. Surface and Coatings Technology, 99, 140-146.
[34] Mofidi, H.H., Rouhaghdam, A.S., Ahangarani, S., Bozorg, M. and Azadi, M. (2013) Fracture Toughness of TiN Coating as a Function of Interlayer Thickness. Advanced Materials Research, 829, 466-470.

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