Author(s)

Moirangthem Shubhakanta Singh¹, R. K. Brojen Singh^2*

¹Department of Physics, Manipur University, Canchipur, India.
²School of Computational and Integrative Sciences, Jawaharlal Nehru University, New Delhi, India.

Monte Carlo simulation of paths of a large number of impinging electrons in a multi-layered solid allows defining area of spreading electrons (A) to capture overall behavior of the solid. This parameter “A” follows power law with electron energy. Furthermore, change in critical energies, which are minimum energies loses corresponding to various electrons, as a function of variation in lateral distance also follows power law nature. This power law behavior could be an indicator of how strong self-organization a solid has which may be used in monitoring efficiency of device fabrication.

Monte Carlo Simulations, Power Law, E-Beam Lithography, Electron Solid Interaction

Singh, M. and Singh, R. (2017) Power Law Nature in Electron Solid Interaction. Advances in Materials Physics and Chemistry, 7, 11-18. doi: 10.4236/ampc.2017.71002.