High Density Fluorine Negative-Ion Source Generated by Utilizing Magnetized SF6 ()
ABSTRACT
In a magnetized plasma column generated from an
electronegative gas, negative-ions accumulate around the plasma column via
radial diffusion. In this study, a dc discharge is applied in SF6 gas to produce a plasma column, and the radial density profile of negative-ions is
measured by Langmuir probes using the modified Bohm criterion. The gas pressure
and discharge current dependences of negative-ion density are
also measured. It is found that the negative-ion density of 8.0 ×
1017 m-3 is obtained around the plasma column at r = 1.0
cm when SF6 pressure is 0.13 Pa and discharge current is 0.50
A. The negative-ion density has radial gradient, and the electron density is
much lower in this region.
Share and Cite:
M. Imtiaz and T. Mieno, "High Density Fluorine Negative-Ion Source Generated by Utilizing Magnetized SF
6,"
Journal of Modern Physics, Vol. 5 No. 2, 2014, pp. 89-91. doi:
10.4236/jmp.2014.52014.
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