Quartz Crystal Microbalances for Evaluating Gas Motion Differences between Dichlorosilane and Trichlorosilane in Ambient Hydrogen in a Slim Vertical Cold Wall Chemical Vapor Deposition Reactor

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ISSN Online: 2160-0406
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"Quartz Crystal Microbalances for Evaluating Gas Motion Differences between Dichlorosilane and Trichlorosilane in Ambient Hydrogen in a Slim Vertical Cold Wall Chemical Vapor Deposition Reactor"
written by Mana Otani, Toshinori Takahashi, Hitoshi Habuka, Yuuki Ishida, Shin-Ichi Ikeda, Shiro Hara,
published by Advances in Chemical Engineering and Science, Vol.10 No.3, 2020

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[3]	Progresses in Synthesis and Application of SiC Films: From CVD to ALD and from MEMS to NEMS Micromachines, 2020 DOI:10.3390/mi11090799

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