"
A Generic MEMS Fabrication Process Based on a Thermal Budget Approach"
written by Carlos Ramón Báez Álvarez, Álvarez, Mónico Linares Aranda, Alfonso Torres Jácome, Mario Moreno Moreno, Joel Molina Reyes, Carlos Zúñiga Islas, Wilfrido Calleja Arriaga,
published by
Journal of Electronics Cooling and Thermal Control,
Vol.6 No.2, 2016
has been cited by the following article(s):