Terahertz Metamaterial-Based Microbolometers Fabricated by Conventional MEMS - Optics and Photonics Journal

OPJ > Vol.6 No.8, August 2016

Terahertz Metamaterial-Based Microbolometers Fabricated by Conventional MEMS ()

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Download as PDF (Size: 902KB) PP. 215-218

DOI: 10.4236/opj.2016.68B036 2,128 Downloads 3,716 Views Citations

Author(s)

Tianhong Ao, Xiangdong Xu^*, Yu Gu, Zhegeng Chen, Yadong Jiang^*, Xinrong Li, Yuxiang Lian, Fu Wang, Qiong He

Affiliation(s)

State Key Laboratory of Electronic Thin Films and Integrated Devices, School of Optoelectronic Information, University of Electronic Science and Technology of China (UESTC), Chengdu, China.

ABSTRACT

37 μm × 37 μm array of metamaterial-based microbolometers was designed and successfully fa-bricated by conventional MEMS technology. FTIR measurements reveal that the as-designed mi-crobolometers exhibit a high absorption of ~31.5% at 3.93 THz. In contrast, no response can be detected from those microbolometers without metamaterials. The experimental results have been confirmed by simulations.

KEYWORDS

Metamaterial, Absorber, MEMS, THz

Share and Cite:

Ao, T. , Xu, X. , Gu, Y. , Chen, Z. , Jiang, Y. , Li, X. , Lian, Y. , Wang, F. and He, Q. (2016) Terahertz Metamaterial-Based Microbolometers Fabricated by Conventional MEMS. Optics and Photonics Journal, 6, 215-218. doi: 10.4236/opj.2016.68B036.

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