Recovery Method of Pyrolytic Carbon Surface after Exposure to Chlorine Trifluoride Gas ()
Masaya Hayashi, Keisuke Kurashima, Hitoshi Habuka, Akio Ishiguro, Shigeaki Ishii, Yoshiaki Daigo, Hideki Ito, Ichiro Mizushima, Yoshinao Takahashi
Advances in Chemical Engineering and Science
Vol.11 No.1,
January 15, 2021
DOI:
10.4236/aces.2021.111005 17 Downloads 67 Views
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