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P. K. Campbell, K. E. Jones, R. J. Huber, K. W. Horch and R. A. Normann, “A Silicon-Based, Three-Dimensional Neural Interface: Manufacturing Processes for an Intracortical Electrode Array,” IEEE Transactions on BioMedical Engineering, Vol. 38, No. 8, 1991, pp. 758-768. doi:10.1109/10.83588

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