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P. R. Chidambaram, C. Bowen, S. Chakravarthi, C. Ma- chala and R. Wise, “Fundamentals of Silicon Material Properties for Successful Exploitation of Strain Engi- neering in Modern CMOS Manufacturing,” IEEE Trans- actions on Electron Devices, Vol. 53, No. 5, 2006, pp. 944-964. doi:10.1109/TED.2006.872912
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