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Demin, V.N., Borisov, V.O., Grachev, G.N., Smirnov, A.L., Khomyakov, M.N. and Bagayev, S.N. (2021) Laser-Plasma Deposition of Silicon Carbonitride Films by the HMDS Vapor Gas Flow Activation after a Laser Beam Focus. Advances in Materials Physics and Chemistry, 11, 121-130.
https://doi.org/10.4236/ampc.2021.117012

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