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has been cited by the following article:

• TITLE: Investigation of Thermodynamic Properties of Zirconia Thin Films by Statistical Moment Method

  AUTHORS: Vu Van Hung, Le Thi Thanh Huong, Dang Thanh Hai

  KEYWORDS: Thin Film, Zirconia, Lattice Constant, Thermal Expansion Coefficient, Specific Heats at the Constant Volume, Statistical Moment Method

  JOURNAL NAME: Materials Sciences and Applications, Vol.9 No.12, November 23, 2018

  ABSTRACT: The moment method in statistical (SMM) dynamics is used to study the thermodynamic quantities of ZrO2 thin films taking into account the anharmonicity effects of the lattice vibrations. The average lattice constant, thermal expansion coefficient and specific heats at the constant volume of ZrO2 thin films are calculated as a function of temperature, pressure and thickness of thin film. SMM calculations are performed using the Buckingham potential for the ZrO2 thin films. In the present study, the influence of temperature, pressure and the size on the thermodynamic quantities of ZrO2 thin film have been studied using three different interatomic potentials. We discuss temperature and thickness dependences of some thermodynamic quantities of ZrO2 thin films and we compare our calculated results with those of the experimental results.