Xu, D., Xiong, B. and Wang, Y. (2010) Modeling of Front-Etched Micromachined Thermopile IR Detector by CMOS Technology. Journal of Microelectromechanical Systems, 19, 1331-1340.

has been cited by the following article:

• TITLE: Advanced Thermopile IR Dual Line Sensor for Smart Home

  AUTHORS: Christophe Escriba, Julien Roux, Georges Soto-Romero, Pascal Acco, David Bourrier, Eric Campo, Jean-Yves Fourniols

  KEYWORDS: Thermopile Array, Thermoelectric Model, Three-Dimensional Micro-Machining, Self-Regulated Special-Purpose Measurement Bench

  JOURNAL NAME: Journal of Sensor Technology, Vol.8 No.4, November 19, 2018

  ABSTRACT: This article presents all steps between the advanced design and the production of CMOS compatible thermoelectric effect infrared sensors dedicated to smart home applications. It will start by making a comparison between thermopile, bolometer and pyroelectric technologies. Although sensitivity performances available with bolometers appear to be better at first sight, it is found that thermopiles have non-negligible advantages that make them more suitable for this application field. Then the different steps necessary for the design will be described, starting from the thermoelectric model of the sensor (temperature gradient, electrical sensitivity, etc.) and considering all steps up to technological manufacturing in a clean room. The results obtained on the structures produced on a specific computer-controlled measurement bench (temperature regulation with an onboard preamplification card) will be presented. Finally, the results prove that the square structures have better performances (S = 82 V/W and NETD = 208 mK).