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Komatsuzaki, H., Suzuki, K., Liu, Y., Kosugi, T., Ikoma, R. and Nishioka, Y. (2011) Flexible Polyimide Micropump Fabricated Using Hot Embossing. Japanese Journal of Applied Physics, 50, 06GM09.
https://doi.org/10.1143/JJAP.50.06GM09

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