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Liu, Y., Komatsuzaki, H., Duan, Z., Imai, S. and Nishioka, Y. (2011) Diffuser Micropump Structured with Extremely Flexible Diaphragm of 2-μm-thick Polyimide Film. Japanese Journal of Applied Physics, 50, 453-455.
https://doi.org/10.1143/JJAP.50.04DK15

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