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L. I. Goray, J. F. Seely, “Efficiencies of Master, Replica, and Multilayer Gratings for the Soft-X-Ray-Extreme-Ultraviolet Range: Modeling Based on the Modified Integral Method and Comparisons with Measurements,” Applied Optics, Vol. 41, No. 7, March 2002, pp. 1434-1445. doi:org/10.1364/AO.41.001434

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