TITLE:
Automated Calibration of RF On-Wafer Probing and Evaluation of Probe Misalignment Effects Using a Desktop Micro-Factory
AUTHORS:
F. T. von Kleist-Retzow, T. Tiemerding, P. Elfert, O. C. Haenssler
KEYWORDS:
Calibration, On-Wafer Measurements, Misalignment, Automation, High Frequency (HF) Probe, Ground-Signal-Ground (GSG) Probe
JOURNAL NAME:
Journal of Computer and Communications,
Vol.4 No.3,
March
2,
2016
ABSTRACT: A fully automatic setup for on-wafer
contact probing will be presented. This setup consists of six automatable nano
positioning axes used as tool holder and a sample holder. With this setup a
fully automatic one-port SOL calibration for a Vector Network Analyzer is done.
Furthermore a fully automated on-wafer contact probing is performed.
Afterwards, the effects of a misalignment of the three tips of a GSG-probe are
examined. Additionally the error on the calibration is calculated to determine
its effect on the measurement. The results show, that a misalignment of the
probe has a high impact on the measurement of the VNA. Hence a fully automated
on-wafer probing presented in this paper is a good way to detect these
misalignments and correct them if necessary.