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W. C. Oliver and G. M. Pharr, “An Improved Technique for Determining Hardness and Elastic Modulus Using Load and Displacement Sensing Indentation Experiment,” Journal of Materials Research, Vol. 7, No. 6, 1992, pp. 1564-1583.

has been cited by the following article:

  • TITLE: Towards Quantitative Characterisation of the Small Force Transducer Used in Nanoindentation Instruments

    AUTHORS: Zhi Li, Uwe Brand

    KEYWORDS: Nanometrology; Nanoindentation Instrument; Nano-Force Transducer; Microelectromechanical Systems; Nano-Force Calibration

    JOURNAL NAME: Modern Instrumentation, Vol.2 No.4, September 30, 2013

    ABSTRACT: Quantitative characterization of the mechanical properties of materials in micro-/nano-scale using depth-sensing indentation technique demands high performance of nanoindentation instruments in use. In this paper, the efforts to calibrate the capacitive force transducer of a commercial nanoindentation instrument are presented, where the quasi-static characteristic of the force transducer has been calibrated by a precise compensation balance with a resolution of ~1 nN. To investigate the dynamic response of the transducer, an electrostatic MEMS (Micro-Electro-Mechanical System) based on nano-force transfer standard with nano-Newton (10-9 Newton) resolution and a bandwidth up to 6 kHz have been employed. Preliminary experimental results indicate that 1) the force transducer under calibration has a probing force uncertainty less than 300 nN (1σ) in the calibration range of 1 mN; 2) the transient duration at contact points amounts to 10 seconds; 3) the overshoot of engagement is pre-load dependent.