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T. Lippert, J. Wei, A. Wokaun, N. Hoogen and O. Nuyken, “Development and Structuring of Combined Positive Negative/Negative-Positive Resists Using Laser Ablation as Positive Dry Etching Technique,” Macromolecular Materials and Engineering, Vol. 283, No. 1, 2000, pp. 140-143. doi:10.1002/1439-2054(20001101)283:1<140::AID-MAME140>3.0.CO;2-F

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