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Matloub, R., Hadad, M., Mazzalai, A., Chidambaram, N., Moulard, G., et al. (2013) Piezoelectric Al1-xScxN Thin Films: A Semiconductor Compatible Solution for Mechanical Energy Harvesting and Sensors. Applied Physics Letters, 102, Article ID: 152903.
https://doi.org/10.1063/1.4800231

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