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Pirati, A., Peeters, R., Smith, D., Lok, S., van Noordenburg, M., van Es, R., Verhoeven, E., Meijer, H., Minnaert, A., van der Horst, J.W. and Meiling, H. (2016) March. EUV Lithography Performance for Manufacturing: Status and Outlook. In SPIE Advanced Lithography, 97760A-97760A.

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