TITLE:
Terahertz Metamaterial-Based Microbolometers Fabricated by Conventional MEMS
AUTHORS:
Tianhong Ao, Xiangdong Xu, Yu Gu, Zhegeng Chen, Yadong Jiang, Xinrong Li, Yuxiang Lian, Fu Wang, Qiong He
KEYWORDS:
Metamaterial, Absorber, MEMS, THz
JOURNAL NAME:
Optics and Photonics Journal,
Vol.6 No.8B,
August
25,
2016
ABSTRACT:
37 μm × 37 μm array of metamaterial-based microbolometers was designed and successfully fa-bricated by conventional MEMS technology. FTIR measurements reveal that the as-designed mi-crobolometers exhibit a high absorption of ~31.5% at 3.93 THz. In contrast, no response can be detected from those microbolometers without metamaterials. The experimental results have been confirmed by simulations.