TITLE:
Comparison on Morphological and Optical Properties of TiO2 Thin Films Grown by Single-Pulse and Multi-Pulse Laser Ablation
AUTHORS:
Yonic Peñaloza-Mendoza, Luis Ponce-Cabrera
KEYWORDS:
Pulsed Laser Deposition, Single-Pulse Ablation, Multi-Pulse Ablation, TiO2 Thin Film
JOURNAL NAME:
Journal of Surface Engineered Materials and Advanced Technology,
Vol.5 No.1,
December
26,
2014
ABSTRACT: TiO2 thin films were prepared on glass substrates using the PLD (Pulsed Laser Deposition) technique.
In order to carry out the ablation process, a Nd:YAG laser was used emitting in 1064 nm
wavelength at 10 Hz repetition rate, set up for operating in both single-pulse and multi-pulse regimes.
A comparison of the deposition rate, the optical and morphological properties of the layers
obtained from both ablation regimes was made, which showed that the multi-pulsed ablation
produced layers with a higher surface quality and better optical properties.