TITLE:
Extended Anode Effect for Tube Inner Coating of Non-Conductive Ceramics by Pulsed Coaxial Magnetron Plasma
AUTHORS:
Musab Timan Idriss Gasab, Hiroyuki Sugawara, Kei Sakata, Hiroshi Fujiyama
KEYWORDS:
Double-Ended Coaxial Magnetron Pulsed Plasma, Tube Inner Coating, Extended Anode Effect, Fine Ceramic Films, Titanium Nitride Films, Titanium Oxide Films
JOURNAL NAME:
Materials Sciences and Applications,
Vol.9 No.1,
January
5,
2018
ABSTRACT: For uniform tube inner coating
of non-conductive thin films, the double-ended coaxial magnetron pulsed
plasma (DCMPP) method was investigated. In this study, coating of TiN and TiO2 was performed. It
was clearly shown that the extended anode effect was strongly influenced by the
electric resistance of the coated thin films on the inner surface of an
insulator tube. Additionally, high frequency (100 kHz) was better for
relatively high plasma density. On the other hand, in the case of titanium
oxide deposition, negative ion productions drastically decrease the deposition
rate and the shifting velocity of plasma main position for coated TiO2 films.