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Zhang, Y.J., Yan, P.X., Wu, Z.G., Zhang, W.W., Zhang, G.A., Liu, W.M. and Xue, Q.J. (2005) Effects of substrate bias and argon flux on the structure of titanium nitride films deposited by filtered cathodic arc plasma. Physica status solidi (a), 202(1), 95-101. doi:10.1002/pssa.200406902

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