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P. Muralt, A. Kholkin, M. Kohli and T. Maeder, “Piezoelectric Actuation of PZT Thin Film Diaphragms at Static and Resonant Conditions,” Sensors Actuators A, Vol. 53, No. 1-3, 1996, pp. 398-404. doi:10.1016/0924-4247(96)01139-9

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