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M. Olfatnia, T. Xu, L. S. Ong, J. M. Miao and Z. H. Wang, “Investigation of Residual Stress and its Effects on the Vibrational Characteristics of Piezoelectric Based Multilayered Microdiaphragms,” Journal of Micromechanics and Microengineering, Vol. 20, No. 1, 2010, Article ID: 15007. doi:10.1088/0960-1317/20/1/015007

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