TITLE:
Design and Analysis of MEMS Based Aluminum Nitride (AlN), Lithium Niobate (LiNbO3) and Zinc Oxide (ZnO) Cantilever with Different Substrate Materials for Piezoelectric Vibration Energy Harvesters Using COMSOL Multiphysics Software
AUTHORS:
Ahmad M. Alsaad, Ahmad A. Ahmad, Qais M. Al-Bataineh, Nermeen S. Daoud, Mais H. Khazaleh
KEYWORDS:
MEMS, Piezoelectric, Energy Harvester, Cantilever, Lithium Niobate (LiNbO3), Aluminum Nitride (AlN), Zinc Oxide (ZnO), Aluminium Substrate, Steel Substrate, Silicon Substrate, COMSOL, Finite Element Method
JOURNAL NAME:
Open Journal of Applied Sciences,
Vol.9 No.4,
April
19,
2019
ABSTRACT: Interest in energy harvesters has grown rapidly over
the last decade. The cantilever shaped piezoelectric energy harvesting beam is
one of the most employed designs, due to its simplicity and flexibility for
further performance enhancement. The research effort in the MEMS Piezoelectric vibration energy harvester designed using three
types of cantilever materials, Lithium Niobate (LiNbO3), Aluminum
Nitride (AlN) and Zinc Oxide (ZnO) with different substrate materials:
aluminum, steel and silicon using COMSOL Multiphysics package were designed and
analyzed. Voltage, mechanical power and electrical power versus frequency for
different cantilever materials and substrates were modeled and simulated using
Finite element method (FEM). The resonant frequencies of the LiNbO3/Al,
AlN/Al and ZnO/Al systems were found to be 187.5 Hz, 279.5 Hz and 173.5 Hz,
respectively. We found that ZnO/Al system yields optimum voltage and electrical
power values of 8.2 V and 2.8 mW, respectively. For ZnO cantilever on aluminum,
steel and silicon substrates, we found the resonant frequencies to be 173.5 Hz, 170 Hz and 175
Hz, respectively. Interestingly, ZnO/steel
yields optimal voltage and electrical power values of 9.83 V and 4.02
mW, respectively. Furthermore, all systems were studied at different
differentiate frequencies. We found that voltage and electrical power have
increased as the acceleration has increased.