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Oralkan, O., Ergun, A.S., Johnson, J.A., Karaman, M., Demirci, U., Kaviani, K., Lee, T.H. and Khuri-Yakub, B.T. (2002) Capacitive Micromachined Ultrasonic Transducers: Next-Generation Arrays for Acoustic Imaging? IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 49, 1596-1610.
https://doi.org/10.1109/TUFFC.2002.1049742
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