Hawryluk, R.J., Hawryluk, A.M. and Smith, H.I. (1982) Addendum: New Model of Electron Free Path in Multiple Layers for Monte Carlo Simulation. Journal of Applied Physics, 53, 5985.
https://doi.org/10.1063/1.331408

has been cited by the following article:

• TITLE: Power Law Nature in Electron Solid Interaction

  AUTHORS: Moirangthem Shubhakanta Singh, R. K. Brojen Singh

  KEYWORDS: Monte Carlo Simulations, Power Law, E-Beam Lithography, Electron Solid Interaction

  JOURNAL NAME: Advances in Materials Physics and Chemistry, Vol.7 No.1, January 22, 2017

  ABSTRACT: Monte Carlo simulation of paths of a large number of impinging electrons in a multi-layered solid allows defining area of spreading electrons (A) to capture overall behavior of the solid. This parameter “A” follows power law with electron energy. Furthermore, change in critical energies, which are minimum energies loses corresponding to various electrons, as a function of variation in lateral distance also follows power law nature. This power law behavior could be an indicator of how strong self-organization a solid has which may be used in monitoring efficiency of device fabrication.