TITLE:
Power Law Nature in Electron Solid Interaction
AUTHORS:
Moirangthem Shubhakanta Singh, R. K. Brojen Singh
KEYWORDS:
Monte Carlo Simulations, Power Law, E-Beam Lithography, Electron Solid Interaction
JOURNAL NAME:
Advances in Materials Physics and Chemistry,
Vol.7 No.1,
January
22,
2017
ABSTRACT: Monte Carlo simulation of paths of a large number of impinging electrons in a multi-layered solid allows defining area of spreading electrons (A) to capture overall behavior of the solid. This parameter “A” follows power law with electron energy. Furthermore, change in critical energies, which are minimum energies loses corresponding to various electrons, as a function of variation in lateral distance also follows power law nature. This power law behavior could be an indicator of how strong self-organization a solid has which may be used in monitoring efficiency of device fabrication.