TITLE:
A Sputtering Deposition of Al Enhances the Output Reproducibility in a Conducting Rubber Force Sensor
AUTHORS:
Masato Ohmukai, Yasushi Kami
KEYWORDS:
Conducting Rubber, Force Sensor, Electrode, Magnetron Sputtering, Reproducibility
JOURNAL NAME:
Journal of Sensor Technology,
Vol.6 No.3,
August
19,
2016
ABSTRACT: Compressive force sensors or pressure sensors are indispensable to tactile sensors in
humanoid robots. It is investigated that low-cost electro-conducting rubber sheets
are applied to the force sensor, of which the biggest problem is its poor reproducibility.
It was found that the aluminum deposition by a vacuum evaporation method
shows excellent characteristics but suffers deterioration by a radiation heating effect.
The aluminum electrode was deposited by a sputtering method, known to have an
advantage of a low-temperature method, and the reproducibility of the output was
improved.