Limitations of On-Wafer Calibration and De-Embedding Methods in the Sub-THz Range

Manuel Potereau, Christian Raya, Magali De Matos, Sébastien Fregonese, Arnaud Curutchet, Min Zhang, Bertrand Ardouin, Thomas Zimmer

1IMS Laboratory, University of Bordeaux 1, Talence, France; 2XMOD Technologies, Bordeaux, France.
IMS Laboratory, University of Bordeaux 1, Talence, France.
IMS Laboratory, University of Bordeaux 1, Talence, France;.
XMOD Technologies, Bordeaux, France.

DOI: 10.4236/jcc.2013.16005                

Abstract

This paper investigates frequency limitations of calibration and de-embedding techniques for S parameter measurements. First, the TRL calibration methods are analysed and the error due to the probe movement when measuring the different line lengths is quantified, next the coupling between the probe-heads and the wafer surface is investigated and finally an upper frequency validity limit for the standard Open-Short de-embedding method is given. The measured results have been confirmed thanks to the use of an electro-magnetic simulator.

Keywords

TRL; Open-Short; De-Embedding; Calibration

Conflicts of Interest

The authors declare no conflicts of interest.

References

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