Maskless Microscopic Lithography through Shaping Ultraviolet Laser with Digital Micro-mirror Device


Laser shaping was introduced to maskless projection soft lithography by using digital micro-mirror device (DMD). The predesigned intensity pattern was imprinted onto the DMD and the input laser beam with a Gaussian or quasi-Gaussian distribution will carry the pattern on DMD to etch the resin. It provides a method of precise control of laser beam shapes and photon-induced curing behavior of resin. This technology provides an accurate micro-fabrication of microstructures used for micro-systems. As a virtual mask generator and a binary-amplitude spatial light modulator, DMD is equivalent to the masks in the conventional exposure system. As the virtual masks and shaped laser beam can be achieved flexibly, it is a good method of precision soft lithography for 2D/3D microstructures.

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X. Ding, Y. Ren and R. Lu, "Maskless Microscopic Lithography through Shaping Ultraviolet Laser with Digital Micro-mirror Device," Optics and Photonics Journal, Vol. 3 No. 2B, 2013, pp. 227-231. doi: 10.4236/opj.2013.32B053.

Conflicts of Interest

The authors declare no conflicts of interest.


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