[1]
|
Electron-beam annealing of Josephson junctions for frequency tuning of quantum processors
|
|
arXiv preprint arXiv …,
2024 |
|
|
[2]
|
Molecular and Atomic Layer Deposition of Hybrid Inorganic-Organic Materials–Deposition on Porous Substrates
|
|
2024 |
|
|
[3]
|
Multilayer thin films of aluminum oxide and tantalum oxide deposited by pulsed direct current magnetron sputtering for dielectric applications
|
|
Vacuum,
2023 |
|
|
[4]
|
High-quality AlN epilayers prepared by atomic layer deposition and large-area rapid electron beam annealing
|
|
Materials Chemistry and …,
2023 |
|
|
[5]
|
The effect of the surface morphology of the aluminium oxide layer on the physical and bacterial attachment behavior
|
|
Surface Topography: Metrology and …,
2023 |
|
|
[6]
|
Effect of Co-fed Water on a Co–Pt–Si/γ-Al2O3 Fischer–Tropsch Catalyst Modified with an Atomic Layer Deposited or Molecular Layer Deposition Overcoating
|
|
ACS …,
2022 |
|
|
[7]
|
Samarium-decorated ZrO2@ SnO2 nanostructures, their electrical, optical and enhanced photoluminescence properties
|
|
Journal of Materials …,
2022 |
|
|
[8]
|
Plasma Oxidized AlOx Tunnel Barriers and Nb/Al Bilayers Examined by Electrical Transport
|
|
2022 |
|
|
[9]
|
Curing defects in plasma-enhanced atomic layer deposition of Al2O3 by six methods
|
|
Materials Science in Semiconductor …,
2022 |
|
|
[10]
|
Use of plasma oxidation for conversion of metal salt infiltrated thin polymer films to metal oxide
|
|
Journal of Physics D …,
2022 |
|
|
[11]
|
MOx materials by ALD method
|
|
Metal Oxides for Non-Volatile Memory,
2022 |
|
|
[12]
|
Untersuchungen zum Einsatz des ms-Blitzlampentemperns bei der Atomlagenabscheidung von dünnen Schichten und für die Rekristallisation von …
|
|
2021 |
|
|
[13]
|
Growth of ultrathin Al2O3 islands on hBN particles by atomic layer deposition in a custom fluidized bed reactor using Al (CH3) 3 and H2O
|
|
2021 |
|
|
[14]
|
3-D Vertical via Nitrogen-Doped Aluminum Oxide Resistive Random-Access Memory
|
|
2021 |
|
|
[15]
|
Selective-area growth study of GaN micropillars for quasi-vertical Schottky diodes
|
|
2021 |
|
|
[16]
|
Boosting Catalytic Lifetime in Chemical Vapor Deposition of Carbon Nanotubes by Rapid Thermal Pretreatment of Alumina-Supported Metal Nanocatalysts
|
|
Chemistry of …,
2021 |
|
|
[17]
|
Fabrication, Characterization, and Modeling of an Aluminum Oxide-Gate Ion-Sensitive Field-Effect Transistor-Based pH Sensor
|
|
Journal of Electronic …,
2021 |
|
|
[18]
|
Comparison of the Growth and Thermal Properties of Nonwoven Polymers after Atomic Layer Deposition and Vapor Phase Infiltration
|
|
Coatings,
2021 |
|
|
[19]
|
Optical study of electron and acoustic phonon confinement in ultrathin-body germanium-on-insulator nanolayers
|
|
2021 |
|
|
[20]
|
Catalyst deactivation by carbon deposition: The remarkable case of nickel confined by atomic layer deposition
|
|
2021 |
|
|
[21]
|
The Effect of Atomic Layer Deposited Overcoat on Co-Pt-Si/γ-Al2O3 Fischer–Tropsch Catalyst
|
|
2021 |
|
|
[22]
|
Structure and Properties of the Al–B–Si–C Coatings Deposited by Magnetron Sputtering
|
|
2020 |
|
|
[23]
|
Atomic layer deposition Al2O3-passivated AlGaN/GaN high-electron-mobility transistors on Si (111) towards reliable high-speed electronics
|
|
2020 |
|
|
[24]
|
A comparative study on atomic layer deposited oxide film morphology and their electrical breakdown
|
|
2020 |
|
|
[25]
|
Normally-off Transistor Topologies in Gallium Nitride Technology
|
|
2020 |
|
|
[26]
|
Mapping Graphene Grain Orientation by the Growth of WS2 Films with Oriented Cracks
|
|
2020 |
|
|
[27]
|
A Thin Alumina Film as a Tritium Adsorption Inhibitor for Stainless Steel 316
|
|
2020 |
|
|
[28]
|
Quantifying the Extent of Ligand Incorporation and the Effect on Properties of TiO2 Thin Films Grown by Atomic Layer Deposition Using an Alkoxide or an Alkylamide
|
|
2020 |
|
|
[29]
|
GaN Micropillar Schottky Diodes with High Breakdown Voltage Fabricated by Selective‐Area Growth
|
|
2019 |
|
|
[30]
|
Epitaxy of High-Quality Single-Crystal Hexagonal Perovskite YAlO3 on GaAs(111)A Using Laminated Atomic Layer Deposition
|
|
2019 |
|
|
[31]
|
Surface reconstruction causes structural variations in nanometric amorphous Al 2 O 3
|
|
2019 |
|
|
[32]
|
Atomic layer deposited TiO2 and Al2O3 thin films as coatings for aluminum food packaging application
|
|
2019 |
|
|
[33]
|
Thermal degradation of refractory layered metamaterial for thermophotovoltaic emitter under high vacuum condition
|
|
2019 |
|
|
[34]
|
Interface characteristics comparison of sapphire direct and indirect wafer bonded structures by transmission electron microscopy
|
|
2019 |
|
|
[35]
|
Hardness and modulus of elasticity of atomic layer deposited Al2O3-ZrO2 nanolaminates and mixtures
|
|
2019 |
|
|
[36]
|
Passivation of Detector‐Grade Float Zone Silicon with Atomic Layer Deposited Aluminum Oxide
|
|
2019 |
|
|
[37]
|
Investigation of annealed, thin (∼ 2.6 nm)-Al2O3/AlGaN/GaN metal-insulator-semiconductor heterostructures on Si (111) via capacitance-voltage and current-voltage …
|
|
2019 |
|
|
[38]
|
Investigating Heteroepitaxy Principles and Transport Characteristics of Vertically Integrated GaN-on-Graphene Heterostructures
|
|
2019 |
|
|
[39]
|
Passivation of Detector‐Grade FZ‐Si with ALD‐Grown Aluminium Oxide
|
|
2019 |
|
|
[40]
|
Inelastic H-Atom scattering from ultra-thin films
|
|
2018 |
|
|
[41]
|
Forming-Free Aluminum Oxide Nitride Resistive Random Access Memory by Atomic Layer Deposition Technique
|
|
2018 |
|
|
[42]
|
Propiedades luminiscentes y estructurales de las películas delgadas de oxinitruro de aluminio dopado con iterbio obtenidas por metodologías combinatorias
|
|
2018 |
|
|
[43]
|
Effect of post deposition annealing and post metallization annealing on electrical and structural characteristics of Pd/Al2O3/6H-SiC MIS capacitors
|
|
2018 |
|
|
[44]
|
Development and Investigation of Metal Oxide Nanostructures for Sensing Applications
|
|
2018 |
|
|
[45]
|
MOCVD Compatible Atomic Layer Deposition Process of Al2O3 on SiC and Graphene/SiC Heterostructures
|
|
2018 |
|
|
[46]
|
Ultra-thin ALD-AlOx/PEDOT:PSS hole selective passivated contacts: An attractive low cost approach to increase solar cell performance
|
|
Solar Energy Materials and Solar Cells,
2018 |
|
|
[47]
|
Effects of substrate heating and post-deposition annealing on characteristics of thin MOCVD HfO 2 films
|
|
2018 |
|
|
[48]
|
Development of extremely low temperature processed oxide thin film transistors via atmospheric steam reforming treatment: Interface, surface, film curing
|
|
Journal of Alloys and Compounds,
2018 |
|
|
[49]
|
Influence of annealing environment on the ALD-Al2O3/4H-SiC interface studied through XPS
|
|
Journal of Physics D: Applied Physics,
2018 |
|
|
[50]
|
Effects of substrate heating and post-deposition annealing on characteristics of thin MOCVD HfO2 films
|
|
IOP Conference Series: Materials Science and Engineering,
2018 |
|
|
[51]
|
Effect of Sm doping and annealing on magnetic and structural properties of sputter deposited SnO2 thin films
|
|
Materials Research Express,
2018 |
|
|
[52]
|
Obtaining low resistivity (∼100 μΩ cm) TiN films by plasma enhanced atomic layer deposition using a metalorganic precursor
|
|
2018 |
|
|
[53]
|
Inelastic H-Atom scattering from ultra-thin films.
|
|
Dissertation,
2018 |
|
|
[54]
|
Obtaining low resistivity (∼ 100 μΩ cm) TiN films by plasma enhanced atomic layer deposition using a metalorganic precursor
|
|
Journal of Vacuum …,
2018 |
|
|
[55]
|
היפוסוליפל רוטקוד
|
|
2018 |
|
|
[56]
|
Statistics-Based Analysis of the Evolution of Structural and Electronic Properties of Realistic Amorphous Alumina During the Densification Process: Insights from First …
|
|
The Journal of Physical Chemistry C,
2017 |
|
|
[57]
|
Silicon surface passivation properties of aluminum oxide grown by atomic layer deposition for low temperature solar cells processes
|
|
Thèse,
2017 |
|
|
[58]
|
Decoupling the Effects of Mass Density and Hydrogen-, Oxygen-, and Aluminum-Based Defects on Optoelectronic Properties of Realistic Amorphous Alumina
|
|
Journal of Physical Chemistry (JPC) Letters,
2017 |
|
|
[59]
|
Microstructural features affecting optical properties of vacuum kinetic sprayed Al2O3 thin film
|
|
Surfaces and Interfaces,
2017 |
|
|
[60]
|
Qualifying ultrathin alumina film prepared by plasma-enhance atomic layer deposition under low temperature operation
|
|
Thin Solid Films,
2017 |
|
|
[61]
|
Density of Nanometrically Thin Amorphous Films Varies by Thickness
|
|
Chemistry of Materials,
2017 |
|
|
[62]
|
Flexible thin film pH sensor based on low‐temperature atomic layer deposition
|
|
physica status solidi (RRL)-Rapid Research Letters,
2017 |
|
|
[63]
|
Growth of aluminum oxide thin films with enhanced film density by the integration of in situ flash annealing into low-temperature atomic layer deposition
|
|
Surface and Coatings Technology,
2017 |
|
|
[64]
|
Fluoride removal in waters using ionic liquid-functionalized alumina as a novel adsorbent
|
|
Journal of Cleaner Production,
2017 |
|
|
[65]
|
High-k/GaN interface engineering toward AlGaN/GaN MIS-HEMT with improved Vth stability
|
|
2017 |
|
|
[66]
|
Potency of commercial TiO2‐P25 nanoparticles to form stainless steel protective coating
|
|
International Journal of Applied Ceramic Technology,
2017 |
|
|
[67]
|
Oxygen-promoted catalyst sintering influences number density, alignment, and wall number of vertically aligned carbon nanotubes
|
|
Nanoscale,
2017 |
|
|
[68]
|
Decoupling the Effects of Mass Density and Hydrogen-, Oxygen-and Aluminum-based Defects on Optoelectronic Properties of Realistic Amorphous Alumina.
|
|
The Journal of Physical Chemistry Letters,
2017 |
|
|
[69]
|
Depth resolved compositional analysis of aluminium oxide thin film using non-destructive soft x-ray reflectivity technique
|
|
Applied Surface Science,
2017 |
|
|
[70]
|
Normally-off fully recess-gated GaN metal–insulator–semiconductor field-effect transistor using Al2O3/Si3N4 bilayer as gate dielectrics
|
|
Applied Physics Express,
2017 |
|
|
[71]
|
Electronic conduction mechanisms in insulators
|
|
2017 |
|
|
[72]
|
Solid state electron transport via myoglobin protein and the role of substrate-protein coupling in such systems
|
|
2017 |
|
|
[73]
|
Atomic layer deposition of thin films: from functional devices to protective coatings
|
|
2016 |
|
|
[74]
|
Tuning of nanoantenna resonances in the mid-infrared spectral range using phase-change materials
|
|
Thesis,
2016 |
|
|
[75]
|
Influences of annealing on structural and compositional properties of Al2O3 thin films grown on 4H–SiC by atomic layer deposition 简
|
|
中国物理B: 英文版,
2016 |
|
|
[76]
|
Influences of annealing on structural and compositional properties of Al2O3 thin films grown on 4H-SiC by atomic layer deposition
|
|
中国物理B: 英文版,
2016 |
|
|
[77]
|
Effect of SiO2 interlayer on the properties of Al2O3 thin films grown by plasma enhanced atomic layer deposition on 4H‐SiC substrates
|
|
physica status solidi (a),
2016 |
|
|
[78]
|
Atomic Layer Deposition of Al2O3 Thin Films Using Dimethyl Aluminum sec-Butoxide and H2O Molecules
|
|
2016 |
|
|
[79]
|
Integrated low‐temperature process for the fabrication of amorphous Si nanoparticles embedded in Al2O3 for non‐volatile memory application
|
|
physica status solidi (a),
2016 |
|
|
[80]
|
Improving the photoelectrocatalytic performance of boron-modified TiO 2/Ti sol–gel-based electrodes for glycerol oxidation under visible illumination
|
|
RSC Advances,
2016 |
|
|
[81]
|
Investigation of Line-Scan Dispersive Interferometry for In-Line Surface Metrology
|
|
2016 |
|
|
[82]
|
Influences of annealing on structural and compositional properties of Al2O3 thin films grown on 4H–SiC by atomic layer deposition
|
|
Chinese Physics B,
2016 |
|
|
[83]
|
New processing techniques for large-area electronics
|
|
2016 |
|
|
[84]
|
Improving the photoelectrocatalytic performance of boron-modified TiO2/Ti sol–gel-based electrodes for glycerol oxidation under visible illumination
|
|
2016 |
|
|
[85]
|
Influences of annealing on structural and compositional properties of Al_2O_3 thin films grown on 4H–SiC by atomic layer deposition
|
|
2016 |
|
|
[86]
|
Corrosion barriers for silver-based telescope mirrors: comparative study of plasma-enhanced atomic layer deposition and reactive evaporation of aluminum oxide
|
|
Journal of Astronomical Telescopes, Instruments, and Systems,
2015 |
|
|
[87]
|
Nucleation, Growth, and Electrical Characterization of Al2O3 Thin Films Grown by Atomic Layer Deposition
|
|
2015 |
|
|
[88]
|
Metalorganic chemical vapor deposition of Al 2 O 3 using trimethylaluminum and O 2 precursors: Growth mechanism and crystallinity
|
|
Journal of Crystal Growth,
2014 |
|
|
[89]
|
Metalorganic chemical vapor deposition of Al 2 O 3 using trimethylaluminum and O 2 precursors: Growth mechanism and crystallinity
|
|
Journal of Crystal Growth,
2014 |
|
|
[90]
|
Metalorganic chemical vapor deposition of Al2O3 using trimethylaluminum and O2 precursors: Growth mechanism and crystallinity
|
|
Journal of Crystal Growth,
2014 |
|
|
[91]
|
Dielectric materials by Atomic Layer Deposition for microelectronics applications
|
|
|
|
|
[92]
|
AFRL-AFOSR-VA-TR-2019-0241
|
|
|
|
|