Author(s)

Musab Timan Idriss Gasab^1*, Hiroyuki Sugawara², Kei Sakata², Hiroshi Fujiyama¹

¹Graduate School of Engineering, Nagasaki University, Nagasaki, Japan.
²GEOMATEC Co Ltd., Miyagi, Japan.

For uniform tube inner coating of non-conductive thin films, the double-ended coaxial magnetron pulsed plasma (DCMPP) method was investigated. In this study, coating of TiN and TiO₂ was performed. It was clearly shown that the extended anode effect was strongly influenced by the electric resistance of the coated thin films on the inner surface of an insulator tube. Additionally, high frequency (100 kHz) was better for relatively high plasma density. On the other hand, in the case of titanium oxide deposition, negative ion productions drastically decrease the deposition rate and the shifting velocity of plasma main position for coated TiO₂ films.

Double-Ended Coaxial Magnetron Pulsed Plasma, Tube Inner Coating, Extended Anode Effect, Fine Ceramic Films, Titanium Nitride Films, Titanium Oxide Films

Gasab, M. , Sugawara, H. , Sakata, K. and Fujiyama, H. (2018) Extended Anode Effect for Tube Inner Coating of Non-Conductive Ceramics by Pulsed Coaxial Magnetron Plasma. Materials Sciences and Applications, 9, 1-10. doi: 10.4236/msa.2018.91001.