A novel hybrid process for surface fluorination of polymers is being introduced. The process is based on ultra violet (UV) laser radiation, which on the one hand forms radicals out of an atmosphere of a partially fluorinated benzene, and on the other hand activates a polymer surface in the areas where the UV radiation hits the surface. The radicals can react with the polymer surface, hence altering the surface energy. With this process, a fluorine content of over 30% on the surface of bulk polystyrene can be achieved, while the smallest possible structure size was smaller than 1 mm.