Crystal Structure Theory and Applications

Volume 1, Issue 3 (December 2012)

ISSN Print: 2169-2491   ISSN Online: 2169-2505

Google-based Impact Factor: 0.43  Citations  

Characterization of Thin Films by Low Incidence X-Ray Diffraction

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DOI: 10.4236/csta.2012.13007    9,538 Downloads   20,020 Views  Citations

ABSTRACT

Glancing Angle X-ray Diffraction (GAXRD) is introduced as a direct, non-destructive, surface-sensitive technique for analysis of thin films. The method was applied to polycrystalline thin films (namely, titanium oxide, zinc selenide, cadmium selenide and combinations thereof) obtained by electrochemical growth, in order to determine the composition of ultra-thin surface layers, to estimate film thickness, and perform depth profiling of multilayered heterostructures. The experimental data are treated on the basis of a simple absorption-diffraction model involving the glancing angle of X-ray incidence.

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M. Bouroushian and T. Kosanovic, "Characterization of Thin Films by Low Incidence X-Ray Diffraction," Crystal Structure Theory and Applications, Vol. 1 No. 3, 2012, pp. 35-39. doi: 10.4236/csta.2012.13007.

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