has been cited by the following article(s):
[1]
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Chemical vapor deposition of a-CNx:H films for electron field emission using band supermagnetron plasma
Journal of Physics: Conference Series,
2014
DOI:10.1088/1742-6596/518/1/012004
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[2]
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N2or H2/Isobutane Supermagnetron Plasma Chemical Vapor Deposition of Hydrogenated Amorphous CNxFilms for Application to Elementary Amorphous CNx:H/p-Si Photovoltaic Cell
Japanese Journal of Applied Physics,
2013
DOI:10.7567/JJAP.52.116201
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