has been cited by the following article(s):
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[1]
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A Novel High-Temperature Pressure Sensor Based on Graphene Coated by Si3N4
IEEE Sensors Journal,
2023
DOI:10.1109/JSEN.2022.3232626
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[2]
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The effect of upper layer in optical capacitor based on SiO2/SiNx/SiO2/Si structure
Optical Materials,
2022
DOI:10.1016/j.optmat.2022.112293
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[3]
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A study on the preparation of passivating surface using bi-layer of nanostructured ZnO and silane functionalized polymer: an alternate option to chromate passivating coating
Journal of Coatings Technology and Research,
2022
DOI:10.1007/s11998-021-00588-5
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[4]
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Passivating antireflection coating of crystalline silicon using i/n a-Si:H/SiN trilayer
Journal of Physics and Chemistry of Solids,
2021
DOI:10.1016/j.jpcs.2021.110127
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[5]
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Passivating antireflection coating of crystalline silicon using i/n a-Si:H/SiN trilayer
Journal of Physics and Chemistry of Solids,
2021
DOI:10.1016/j.jpcs.2021.110127
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[6]
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Effect of H
2
addition during PECVD on the moisture barrier property and environmental stability of H:SiN
x
film
Journal of the American Ceramic Society,
2021
DOI:10.1111/jace.18000
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[7]
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Surface functionalization of PEEK with silicon nitride
Biomedical Materials,
2021
DOI:10.1088/1748-605X/abb6b1
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[8]
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Wet oxidation growth of hafnium doped tantalum oxide films with different composition deposited on silicon substrate
Applied Surface Science,
2020
DOI:10.1016/j.apsusc.2020.146722
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[9]
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On the Impact of Strained PECVD Nitride Layers on Oxide Precipitate Nucleation in Silicon
ECS Journal of Solid State Science and Technology,
2019
DOI:10.1149/2.0061909jss
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