has been cited by the following article(s):
[1]
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True 3D Nanometrology: 3D-Probing with a Cantilever-Based Sensor
Sensors,
2021
DOI:10.3390/s22010314
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[2]
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Transferable micromachined piezoresistive force sensor with integrated double-meander-spring system
Journal of Sensors and Sensor Systems,
2017
DOI:10.5194/jsss-6-121-2017
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