Faculty of Post Graduate, National Institute of Science and Technology, Jakarta 12640, Indonesia
Leibniz Institute of Surface Engineering (IOM), Permoserstrasse 15, D-04318 Leipzig, Germany
Leibniz Institute of Surface Engineering (IOM), Permoserstrasse 15, D-04318 Leipzig, Germany
Leibniz Institute of Surface Engineering (IOM), Permoserstrasse 15, D-04318 Leipzig, Germany
Copyright © 2020 Sri Vidawati, Jürgen W. Gerlach, Benjamin Herold, Bernd Rauschenbach et al. This is
an open access article distributed under the Creative Commons Attribution
License, which permits unrestricted use, distribution, and reproduction in any
medium, provided the original work is properly cited.
How to Cite this Article
Vidawati, S. , Gerlach, J. , Herold, B. and Rauschenbach, B. (2020) Structural Characterization of Thin Epitaxial GaN Films on Polymer Polyimides Substrates by Ion Beam Assisted Deposition.
Advances in Materials Physics and Chemistry,
10, 199-206. doi:
10.4236/ampc.2020.109015.